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Scudder, L.
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Journal Article
Mandol, B.
,
N. Mahuli
,
K. Ohno
,
L. Scudder
, and
S. K. Sarkar
.
"
Atomic layer deposition of chromium oxide - An interplay between deposition and etching
."
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
39 (2021).