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Atomic layer deposition of chromium oxide - An interplay between deposition and etching
Thu, 2021-07-22 16:12 — venkatr
| Title | Atomic layer deposition of chromium oxide - An interplay between deposition and etching |
| Publication Type | Journal Article |
| Year of Publication | 2021 |
| Authors | Mandol, B., N. Mahuli, K. Ohno, L. Scudder, and S. K. Sarkar |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 39 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85105185367&doi=10.1116%2f6.0000896&partnerID=40&md5=e06cf9c80adcfedd6f792d1102d29cb2 |
| DOI | 10.1116/6.0000896 |