Laser fired ohmic contacts in silicon using pulse modulated CW laser

TitleLaser fired ohmic contacts in silicon using pulse modulated CW laser
Publication TypeConference Paper
Year of Publication2014
AuthorsKumar, A., S. Mondal, A. Soman, and A. Antony
Conference Name2014 IEEE 2nd International Conference on Emerging Electronics: Materials to Devices, ICEE 2014 - Conference Proceedings
URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-84988306410&doi=10.1109%2fICEmElec.2014.7151214&partnerID=40&md5=cd66144717867d9203b9ac3d7e0bd781
DOI10.1109/ICEmElec.2014.7151214