Ultra thin SiNx on a-Si in-situ hot-wire CVD by decomposing NH3 gas

TitleUltra thin SiNx on a-Si in-situ hot-wire CVD by decomposing NH3 gas
Publication TypeJournal Article
Year of Publication2014
AuthorsRai, D. K. R., D. S. Sutar, C. S. Solanki, and K. R. Balasubramaniam
JournalAdvanced Materials Research
Volume894
Pagination421-426
URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-84903370883&doi=10.4028%2fwww.scientific.net%2fAMR.894.421&partnerID=40&md5=998a6bb930a2e2820481e01fd764ae88
DOI10.4028/www.scientific.net/AMR.894.421