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Title | Ultra thin SiNx on a-Si in-situ hot-wire CVD by decomposing NH3 gas |
Publication Type | Journal Article |
Year of Publication | 2014 |
Authors | Rai, D. K. R., D. S. Sutar, C. S. Solanki, and K. R. Balasubramaniam |
Journal | Advanced Materials Research |
Volume | 894 |
Pagination | 421-426 |
URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84903370883&doi=10.4028%2fwww.scientific.net%2fAMR.894.421&partnerID=40&md5=998a6bb930a2e2820481e01fd764ae88 |
DOI | 10.4028/www.scientific.net/AMR.894.421 |