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Molecular layer deposition of alucone films using trimethylaluminum and hydroquinone
Thu, 2021-07-22 16:08 — venkatr
| Title | Molecular layer deposition of alucone films using trimethylaluminum and hydroquinone |
| Publication Type | Journal Article |
| Year of Publication | 2015 |
| Authors | Choudhury, D., S. K. Sarkar, and N. Mahuli |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 33 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84908565084&doi=10.1116%2f1.4900934&partnerID=40&md5=7fb4fe80be771166fe40fb9d579d5bea |
| DOI | 10.1116/1.4900934 |