Mechanism for formation of ultra thin SiNx on a-Si - XPS and FTIR studies

TitleMechanism for formation of ultra thin SiNx on a-Si - XPS and FTIR studies
Publication TypeConference Paper
Year of Publication2015
AuthorsRai, D. K., A. K. Panchal, D. S. Sutar, C. S. Solanki, and K. R. Balasubramaniam
Conference Name2015 IEEE 42nd Photovoltaic Specialist Conference, PVSC 2015
URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-84961589300&doi=10.1109%2fPVSC.2015.7355805&partnerID=40&md5=aab23353b1d472cef60b2075bc919df5
DOI10.1109/PVSC.2015.7355805