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Impact of post-deposition plasma treatment on surface passivation quality of silicon nitride films
Thu, 2021-07-22 16:08 — venkatr
| Title | Impact of post-deposition plasma treatment on surface passivation quality of silicon nitride films |
| Publication Type | Journal Article |
| Year of Publication | 2016 |
| Authors | Saseendran, S. S., M. C. Raval, and A. Kottantharayil |
| Journal | IEEE Journal of Photovoltaics |
| Volume | 6 |
| Pagination | 74-78 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84946762027&doi=10.1109%2fJPHOTOV.2015.2493369&partnerID=40&md5=0f83c519c74bdfcf4507eabdfc0bebc7 |
| DOI | 10.1109/JPHOTOV.2015.2493369 |