Impact of post-deposition plasma treatment on surface passivation quality of silicon nitride films

Thu, 2021-07-22 16:08 — venkatr
TitleImpact of post-deposition plasma treatment on surface passivation quality of silicon nitride films
Publication TypeJournal Article
Year of Publication2016
AuthorsSaseendran, S. S., M. C. Raval, and A. Kottantharayil
JournalIEEE Journal of Photovoltaics
Volume6
Pagination74-78
URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-84946762027&doi=10.1109%2fJPHOTOV.2015.2493369&partnerID=40&md5=0f83c519c74bdfcf4507eabdfc0bebc7
DOI10.1109/JPHOTOV.2015.2493369

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