Fabrication of silicon quantum dots in SiNx multilayer using hot-wire CVD

Thu, 2021-07-22 16:07 — venkatr
TitleFabrication of silicon quantum dots in SiNx multilayer using hot-wire CVD
Publication TypeJournal Article
Year of Publication2009
AuthorsPanchal, A. K., and C. S. Solanki
JournalJournal of Crystal Growth
Volume311
Pagination2659-2663
URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-65349187670&doi=10.1016%2fj.jcrysgro.2009.03.013&partnerID=40&md5=dda630f9fbb04951891424b96979d813
DOI10.1016/j.jcrysgro.2009.03.013

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