Effect of partial pressure of precursors on atomic layer deposited zinc oxide films as TCO material in solar cell application

TitleEffect of partial pressure of precursors on atomic layer deposited zinc oxide films as TCO material in solar cell application
Publication TypeJournal Article
Year of Publication2014
AuthorsSinha, S., and S. K. Sarkar
JournalApplied Mechanics and Materials
Volume492
Pagination341-345
URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-84892863823&doi=10.4028%2fwww.scientific.net%2fAMM.492.341&partnerID=40&md5=c0c4f7036b8d64e11b880e52c82ffed8
DOI10.4028/www.scientific.net/AMM.492.341