A critical study on different hydrogen plasma treatment methods of a-Si: H/c-Si interface for enhanced defect passivation

TitleA critical study on different hydrogen plasma treatment methods of a-Si: H/c-Si interface for enhanced defect passivation
Publication TypeJournal Article
Year of Publication2021
AuthorsSoman, A., and A. Antony
JournalApplied Surface Science
Volume553
URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-85103110464&doi=10.1016%2fj.apsusc.2021.149551&partnerID=40&md5=c441d6cc45327f49613656353990160f
DOI10.1016/j.apsusc.2021.149551