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Title | A critical study on different hydrogen plasma treatment methods of a-Si: H/c-Si interface for enhanced defect passivation |
Publication Type | Journal Article |
Year of Publication | 2021 |
Authors | Soman, A., and A. Antony |
Journal | Applied Surface Science |
Volume | 553 |
URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85103110464&doi=10.1016%2fj.apsusc.2021.149551&partnerID=40&md5=c441d6cc45327f49613656353990160f |
DOI | 10.1016/j.apsusc.2021.149551 |