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Comparison on atomic/molecular layer deposition grown aluminum alkoxide polymer films using alkane and alkyne organic precursors
Thu, 2021-07-22 16:10 — venkatr
| Title | Comparison on atomic/molecular layer deposition grown aluminum alkoxide polymer films using alkane and alkyne organic precursors |
| Publication Type | Journal Article |
| Year of Publication | 2018 |
| Authors | Choudhury, D., G. Rajaraman, and S. K. Sarkar |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 36 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85034660075&doi=10.1116%2f1.4990776&partnerID=40&md5=9fabf2d2732d0a6797f32bfe2543ba64 |
| DOI | 10.1116/1.4990776 |