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Boron-rich layer properties formed by boron spin on dopant diffusion in n-type silicon
Thu, 2021-07-22 16:10 — venkatr
| Title | Boron-rich layer properties formed by boron spin on dopant diffusion in n-type silicon |
| Publication Type | Journal Article |
| Year of Publication | 2017 |
| Authors | Singha, B., and C. S. Solanki |
| Journal | Materials Science in Semiconductor Processing |
| Volume | 57 |
| Pagination | 83-89 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84992055655&doi=10.1016%2fj.mssp.2016.09.034&partnerID=40&md5=e7410c6aec426b3ea89748cbd5d84c4e |
| DOI | 10.1016/j.mssp.2016.09.034 |