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Atomic layer deposition of Zn3N2 thin films: Growth mechanism and application in thin film transistor
Thu, 2021-07-22 16:08 — venkatr
| Title | Atomic layer deposition of Zn3N2 thin films: Growth mechanism and application in thin film transistor |
| Publication Type | Journal Article |
| Year of Publication | 2015 |
| Authors | Sinha, S., D. Choudhury, G. Rajaraman, and S. K. Sarkar |
| Journal | RSC Advances |
| Volume | 5 |
| Pagination | 22712-22717 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84929993464&doi=10.1039%2fc4ra12776e&partnerID=40&md5=9c3ecc05d32c7c6c565bd0c0d02374e4 |
| DOI | 10.1039/c4ra12776e |