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Annealing effects on capacitance-voltage characteristics of a-Si/SiN x multilayer prepared using hot-wire chemical vapour deposition
Thu, 2021-07-22 16:07 — venkatr
| Title | Annealing effects on capacitance-voltage characteristics of a-Si/SiN x multilayer prepared using hot-wire chemical vapour deposition |
| Publication Type | Journal Article |
| Year of Publication | 2011 |
| Authors | Panchal, A. K., D. K. Rai, and C. S. Solanki |
| Journal | Journal of Nanoscience and Nanotechnology |
| Volume | 11 |
| Pagination | 3414-3417 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-80051919389&doi=10.1166%2fjnn.2011.3618&partnerID=40&md5=bace418ab7b98539a9912f6eaa0ab4dc |
| DOI | 10.1166/jnn.2011.3618 |