- Research
- Research
- Publications
- PhD Theses
- Projects
- Academics
- Admissions
- M.Tech @ ESE
- Ph.D @ ESE
- DD MSc - Phd
- DD (B.Tech.-M.Tech.)
- B.Tech
- Minor in Energy
- Faculty Advisors
- Activities
- News and Events
- Seminars
- List of Holidays
Study of defect formation from process step anomalies in limited boron source diffusion in crystalline silicon
Thu, 2021-07-22 16:09 — venkatr
| Title | Study of defect formation from process step anomalies in limited boron source diffusion in crystalline silicon |
| Publication Type | Conference Paper |
| Year of Publication | 2016 |
| Authors | Singha, B., and C. S. Solanki |
| Conference Name | AIP Conference Proceedings |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84984562957&doi=10.1063%2f1.4946635&partnerID=40&md5=b52dc6cd48d71abdd65ef552a7ab1869 |
| DOI | 10.1063/1.4946635 |