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Fabrication of silicon quantum dots in SiNx multilayer using hot-wire CVD
Thu, 2021-07-22 16:07 — venkatr
| Title | Fabrication of silicon quantum dots in SiNx multilayer using hot-wire CVD |
| Publication Type | Journal Article |
| Year of Publication | 2009 |
| Authors | Panchal, A. K., and C. S. Solanki |
| Journal | Journal of Crystal Growth |
| Volume | 311 |
| Pagination | 2659-2663 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-65349187670&doi=10.1016%2fj.jcrysgro.2009.03.013&partnerID=40&md5=dda630f9fbb04951891424b96979d813 |
| DOI | 10.1016/j.jcrysgro.2009.03.013 |