Boron-rich layer properties formed by boron spin on dopant diffusion in n-type silicon

TitleBoron-rich layer properties formed by boron spin on dopant diffusion in n-type silicon
Publication TypeJournal Article
Year of Publication2017
AuthorsSingha, B., and C. S. Solanki
JournalMaterials Science in Semiconductor Processing
Volume57
Pagination83-89
URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-84992055655&doi=10.1016%2fj.mssp.2016.09.034&partnerID=40&md5=e7410c6aec426b3ea89748cbd5d84c4e
DOI10.1016/j.mssp.2016.09.034