Atomic layer deposition of Zn<inf>3</inf>N<inf>2</inf> thin films: Growth mechanism and application in thin film transistor

TitleAtomic layer deposition of Zn<inf>3</inf>N<inf>2</inf> thin films: Growth mechanism and application in thin film transistor
Publication TypeJournal Article
Year of Publication2015
AuthorsSinha, S., D. Choudhury, G. Rajaraman, and S. K. Sarkar
JournalRSC Advances
Volume5
Pagination22712-22717
URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-84929993464&doi=10.1039%2fc4ra12776e&partnerID=40&md5=9c3ecc05d32c7c6c565bd0c0d02374e4
DOI10.1039/c4ra12776e