Atomic layer deposition of textured zinc nitride thin films

TitleAtomic layer deposition of textured zinc nitride thin films
Publication TypeJournal Article
Year of Publication2014
AuthorsSinha, S., and S. K. Sarkar
JournalRSC Advances
Volume4
Pagination47177-47183
URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-84907896228&doi=10.1039%2fc4ra06308b&partnerID=40&md5=c70eb64ed3dc8c8d4e6bdcf49892f365
DOI10.1039/c4ra06308b