Annealing effects on capacitance-voltage characteristics of a-Si/SiN <inf>x</inf> multilayer prepared using hot-wire chemical vapour deposition

TitleAnnealing effects on capacitance-voltage characteristics of a-Si/SiN x multilayer prepared using hot-wire chemical vapour deposition
Publication TypeJournal Article
Year of Publication2011
AuthorsPanchal, A. K., D. K. Rai, and C. S. Solanki
JournalJournal of Nanoscience and Nanotechnology
Volume11
Pagination3414-3417
URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-80051919389&doi=10.1166%2fjnn.2011.3618&partnerID=40&md5=bace418ab7b98539a9912f6eaa0ab4dc
DOI10.1166/jnn.2011.3618